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US Patent Issued to ENTEGRIS on Aug. 25 for "Method and device to regulate purge into a container" (Colorado, Minnesota Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,097, issued on Aug. 25, was assigned to ENTEGRIS INC. (Billerica, Mass.). "Method and device to regulate purge into a container" was invent... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Substrate processing system and condition monitoring method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,098, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate processing system and condition monitoring method" was inve... Read More


US Patent Issued to NGK INSULATORS on Aug. 25 for "Wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,099, issued on Aug. 25, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan). "Wafer placement table" was invented by Reo Watanabe (Han... Read More


US Patent Issued to KOKUSAI ELECTRIC on Aug. 25 for "Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of determining presence or absence of substrate" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,100, issued on Aug. 25, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo). "Substrate processing apparatus, substrate processing method, metho... Read More


US Patent Issued to SHINKO ELECTRIC INDUSTRIES on Aug. 25 for "Electrostatic chuck and substrate fixing device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,101, issued on Aug. 25, was assigned to SHINKO ELECTRIC INDUSTRIES Co. LTD. (Nagano, Japan). "Electrostatic chuck and substrate fixing devi... Read More


US Patent Issued to KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION on Aug. 25 for "Cryogenic electrostatic chuck system and method for controlling same" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,102, issued on Aug. 25, was assigned to KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION (Seoul, South Korea). "Cryogenic el... Read More


US Patent Issued to Infineon Technologies Austria on Aug. 25 for "Semiconductor device having a detachable foil, power electronics arrangement, and method for fabricating a semiconductor device" (German Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,103, issued on Aug. 25, was assigned to Infineon Technologies Austria AG (Villach, Austria). "Semiconductor device having a detachable foil... Read More


US Patent Issued to BONDTECH on Aug. 25 for "Chip bonding system and chip bonding method" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,104, issued on Aug. 25, was assigned to BONDTECH Co. LTD. (Kyoto, Japan). "Chip bonding system and chip bonding method" was invented by Aki... Read More


US Patent Issued to DOW TORAY on Aug. 25 for "Integrated dicing die bonding sheet and method for producing semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,105, issued on Aug. 25, was assigned to DOW TORAY Co. LTD. (Tokyo). "Integrated dicing die bonding sheet and method for producing semicondu... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Substrate processing apparatus and transfer method" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,106, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate processing apparatus and transfer method" was invented by T... Read More